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Ivo Rangelow Prof. Dr.
Ivo Rangelow Prof. Dr.
Verified email at tu-ilmenau.de - Homepage
Title
Cited by
Cited by
Year
Radiation hard silicon detectors—Developments by the RD48 (ROSE) collaboration
G Lindström, M Ahmed, S Albergo, P Allport, D Anderson, L Andricek, ...
Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2001
649*2001
Critical tasks in high aspect ratio silicon dry etching for microelectromechanical systems
IW Rangelow
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 21 (4 …, 2003
2772003
Components for high speed atomic force microscopy
GE Fantner, G Schitter, JH Kindt, T Ivanov, K Ivanova, R Patel, ...
Ultramicroscopy 106 (8-9), 881-887, 2006
2722006
Electrostatically driven microgripper
BE Volland, H Heerlein, IW Rangelow
Microelectronic engineering 61, 1015-1023, 2002
1612002
Low pressure plasmas and microstructuring technology
G Franz
Springer Science & Business Media, 2009
1602009
Thermochemical nanopatterning of organic semiconductors
O Fenwick, L Bozec, D Credgington, A Hammiche, GM Lazzerini, ...
Nature nanotechnology 4 (10), 664-668, 2009
1502009
Tuning the photonic bandgap properties of crystalline arrays of polystyrene beads by annealing at elevated temperatures
B Gates, SH Park, Y Xia
Advanced Materials 12 (9), 653-656, 2000
1412000
Piezoresistive sensors for scanning probe microscopy
T Gotszalk, P Grabiec, IW Rangelow
Ultramicroscopy 82 (1-4), 39-48, 2000
1412000
Nanoscale engineering and optical addressing of single spins in diamond
S Pezzagna, D Wildanger, P Mazarov, AD Wieck, Y Sarov, I Rangelow, ...
small 6 (19), 2117-2121, 2010
1382010
Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase …
R Pedrak, T Ivanov, K Ivanova, T Gotszalk, N Abedinov, IW Rangelow, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2003
1192003
Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers
R Linnemann, T Gotszalk, IW Rangelow, P Dumania, E Oesterschulze
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996
1161996
Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution
J Meijer, S Pezzagna, T Vogel, B Burchard, HH Bukow, IW Rangelow, ...
Applied Physics A 91, 567-571, 2008
1142008
Electrical activation and electron spin coherence of ultralow dose antimony implants in silicon
T Schenkel, JA Liddle, A Persaud, AM Tyryshkin, SA Lyon, R De Sousa, ...
Applied Physics Letters 88 (11), 2006
1132006
Time-domain travelling-wave model for quantum dot passively mode-locked lasers
M Rossetti, P Bardella, I Montrosset
IEEE Journal of Quantum Electronics 47 (2), 139-150, 2011
1072011
Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection
N Abedinov, P Grabiec, T Gotszalk, T Ivanov, J Voigt, IW Rangelow
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 19 (6 …, 2001
1042001
Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication
IW Rangelow, T Ivanov, A Ahmad, M Kaestner, C Lenk, IS Bozchalooi, ...
Journal of Vacuum Science & Technology B 35 (6), 2017
992017
Dry etching-based silicon micro-machining for MEMS
IW Rangelow
Vacuum 62 (2-3), 279-291, 2001
992001
Concept of deterministic single ion doping with sub-nm spatial resolution
J Meijer, T Vogel, B Burchard, IW Rangelow, L Bischoff, J Wrachtrup, ...
Applied Physics A 83, 321-327, 2006
962006
Characterization of a cantilever with an integrated deflection sensor
R Linnemann, T Gotszalk, L Hadjiiski, IW Rangelow
Thin Solid Films 264 (2), 159-164, 1995
921995
Novel high resolution scanning thermal probe
K Edinger, T Gotszalk, IW Rangelow
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2001
902001
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Articles 1–20