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Steve Lenk
Steve Lenk
Researcher, Fraunhofer IOSB-AST
Verified email at iosb-ast.fraunhofer.de
Title
Cited by
Cited by
Year
Pattern-generation and pattern-transfer for single-digit nano devices
IW Rangelow, A Ahmad, T Ivanov, M Kaestner, Y Krivoshapkina, ...
Journal of Vacuum Science & Technology B 34 (6), 2016
472016
Advanced electric-field scanning probe lithography on molecular resist using active cantilever
M Kaestner, C Aydogan, T Ivanov, A Ahmad, T Angelov, A Reum, ...
Journal of Micro/Nanolithography, MEMS, and MOEMS 14 (3), 031202-031202, 2015
462015
Artificial intelligence for electricity supply chain automation
L Richter, M Lehna, S Marchand, C Scholz, A Dreher, S Klaiber, S Lenk
Renewable and Sustainable Energy Reviews 163, 112459, 2022
432022
Scanning probes in nanostructure fabrication
M Kaestner, T Ivanov, A Schuh, A Ahmad, T Angelov, Y Krivoshapkina, ...
Journal of Vacuum Science & Technology B 32 (6), 2014
422014
Large area fast-AFM scanning with active “Quattro” cantilever arrays
A Ahmad, N Nikolov, T Angelov, T Ivanov, A Reum, I Atanasov, E Guliyev, ...
Journal of Vacuum Science & Technology B 34 (6), 2016
372016
Room-temperature single dopant atom quantum dot transistors in silicon, formed by field-emission scanning probe lithography
Z Durrani, M Jones, F Abualnaja, C Wang, M Kaestner, S Lenk, C Lenk, ...
Journal of Applied Physics 124 (14), 2018
362018
Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy
IW Rangelow, M Kaestner, T Ivanov, A Ahmad, S Lenk, C Lenk, E Guliyev, ...
Journal of Vacuum Science & Technology B 36 (6), 2018
302018
Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography
T Angelov, A Ahmad, E Guliyev, A Reum, I Atanasov, T Ivanov, V Ishchuk, ...
Journal of Vacuum Science & Technology B 34 (6), 2016
252016
Experimental study of field emission from ultrasharp silicon, diamond, GaN, and tungsten tips in close proximity to the counter electrode
C Lenk, S Lenk, M Holz, E Guliyev, M Hofmann, T Ivanov, IW Rangelow, ...
Journal of Vacuum Science & Technology B 36 (6), 2018
242018
Electric field scanning probe lithography on molecular glass resists using self-actuating, self-sensing cantilever
M Kaestner, K Nieradka, T Ivanov, S Lenk, Y Krivoshapkina, A Ahmad, ...
Alternative Lithographic Technologies VI 9049, 55-63, 2014
232014
Quantum approximate optimization algorithm for qudit systems
Y Deller, S Schmitt, M Lewenstein, S Lenk, M Federer, F Jendrzejewski, ...
Physical Review A 107 (6), 062410, 2023
202023
Nanofabrication by field-emission scanning probe lithography and cryogenic plasma etching
C Lenk, M Hofmann, S Lenk, M Kaestner, T Ivanov, Y Krivoshapkina, ...
Microelectronic Engineering 192, 77-82, 2018
202018
Quantum optimization: Potential, challenges, and the path forward
A Abbas, A Ambainis, B Augustino, A Bärtschi, H Buhrman, C Coffrin, ...
arXiv preprint arXiv:2312.02279, 2023
192023
Field-emission scanning probe lithography tool for 150 mm wafer
M Holz, E Guliyev, A Ahmad, T Ivanov, A Reum, M Hofmann, C Lenk, ...
Journal of Vacuum Science & Technology B 36 (6), 2018
192018
Low-energy electron exposure of ultrathin polymer films with scanning probe lithography
Y Krivoshapkina, M Kaestner, C Lenk, S Lenk, IW Rangelow
Microelectronic Engineering 177, 78-86, 2017
192017
2D simulation of Fowler-Nordheim electron emission in scanning probe lithography
S Lenk, M Kaestner, C Lenk, T Angelov, Y Krivoshapkina, IW Rangelow
J Nanomater Mol Nanotechnol 5 (6), 1000201, 2016
192016
Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions
IW Rangelow, C Lenk, M Hofmann, S Lenk, T Ivanov, A Ahmad, ...
Novel Patterning Technologies 2018 10584, 13-25, 2018
142018
Scanning probe-based high-accuracy overlay alignment concept for lithography applications
V Ishchuk, E Guliyev, C Aydogan, I Buliev, M Kaestner, T Ivanov, A Ahmad, ...
Applied Physics A 123, 1-12, 2017
132017
Simulation of field emission from volcano-gated tips for scanning probe lithography
S Lenk, M Kaestner, C Lenk, IW Rangelow
Microelectronic Engineering 177, 19-24, 2017
122017
Quantum optimization: Potential, challenges, and the path forward (2023)
A Abbas, A Ambainis, B Augustino, A Bärtschi, H Buhrman, C Coffrin, ...
arXiv preprint arXiv:2312.02279, 0
11
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