| Pattern-generation and pattern-transfer for single-digit nano devices IW Rangelow, A Ahmad, T Ivanov, M Kaestner, Y Krivoshapkina, ... Journal of Vacuum Science & Technology B, Nanotechnology and …, 2016 | 47 | 2016 |
| Scanning probes in nanostructure fabrication M Kaestner, T Ivanov, A Schuh, A Ahmad, T Angelov, Y Krivoshapkina, ... Journal of Vacuum Science & Technology B 32 (6), 2014 | 42 | 2014 |
| Quasi-monolithic integration of silicon-MEMS with piezoelectric actuators for high-speed non-contact atomic force microscopy E Guliyev, BE Volland, Y Sarov, T Ivanov, M Klukowski, E Manske, ... Measurement Science and Technology 23 (7), 074012, 2012 | 40 | 2012 |
| Large area fast-AFM scanning with active “Quattro” cantilever arrays A Ahmad, N Nikolov, T Angelov, T Ivanov, A Reum, I Atanasov, E Guliyev, ... Journal of Vacuum Science & Technology B 34 (6), 2016 | 37 | 2016 |
| Duo-action electro thermal micro gripper BE Volland, K Ivanova, T Ivanov, Y Sarov, E Guliyev, A Persaud, ... Microelectronic engineering 84 (5-8), 1329-1332, 2007 | 36 | 2007 |
| Scanning probe lithography approach for beyond CMOS devices Z Durrani, M Jones, M Kaestner, M Hofer, E Guliyev, A Ahmad, T Ivanov, ... Alternative Lithographic Technologies V 8680, 237-248, 2013 | 32 | 2013 |
| Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy IW Rangelow, M Kaestner, T Ivanov, A Ahmad, S Lenk, C Lenk, E Guliyev, ... Journal of Vacuum Science & Technology B 36 (6), 2018 | 30 | 2018 |
| Micromachined self-actuated piezoresistive cantilever for high speed SPM T Michels, E Guliyev, M Klukowski, IW Rangelow Microelectronic engineering 97, 265-268, 2012 | 28 | 2012 |
| Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography T Angelov, A Ahmad, E Guliyev, A Reum, I Atanasov, T Ivanov, V Ishchuk, ... Journal of Vacuum Science & Technology B 34 (6), 2016 | 25 | 2016 |
| Experimental study of field emission from ultrasharp silicon, diamond, GaN, and tungsten tips in close proximity to the counter electrode C Lenk, S Lenk, M Holz, E Guliyev, M Hofmann, T Ivanov, IW Rangelow, ... Journal of Vacuum Science & Technology B 36 (6), 2018 | 24 | 2018 |
| Electric field scanning probe lithography on molecular glass resists using self-actuating, self-sensing cantilever M Kaestner, K Nieradka, T Ivanov, S Lenk, Y Krivoshapkina, A Ahmad, ... Alternative Lithographic Technologies VI 9049, 55-63, 2014 | 23 | 2014 |
| 0.1-nanometer resolution positioning stage for sub-10 nm scanning probe lithography N Vorbringer-Doroshovets, F Balzer, R Fuessl, E Manske, M Kaestner, ... Alternative Lithographic Technologies V 8680, 249-258, 2013 | 23 | 2013 |
| High speed quasi-monolithic silicon/piezostack SPM scanning stage E Guliyev, T Michels, BE Volland, T Ivanov, M Hofer, IW Rangelow Microelectronic engineering 98, 520-523, 2012 | 20 | 2012 |
| Field-emission scanning probe lithography tool for 150 mm wafer M Holz, E Guliyev, A Ahmad, T Ivanov, A Reum, M Hofmann, C Lenk, ... Journal of Vacuum Science & Technology B 36 (6), 2018 | 19 | 2018 |
| Improved single ion implantation with scanning probe alignment M Ilg, CD Weis, J Schwartz, A Persaud, Q Ji, C Chi Lo, J Bokor, A Hegyi, ... Journal of Vacuum Science & Technology B 30 (6), 2012 | 17 | 2012 |
| Fabrication of self-actuated piezoresistive thermal probes M Hofer, T Ivanov, M Rudek, D Kopiec, E Guliyev, TP Gotszalk, ... Microelectronic Engineering 145, 32-37, 2015 | 15 | 2015 |
| Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for single digit nanodevices IW Rangelow, C Lenk, M Hofmann, S Lenk, T Ivanov, E Guliyev, A Ahmad, ... Emerging Patterning Technologies 2018 10584, 1058406, 2018 | 14* | 2018 |
| Scanning probe-based high-accuracy overlay alignment concept for lithography applications V Ishchuk, E Guliyev, C Aydogan, I Buliev, M Kaestner, T Ivanov, A Ahmad, ... Applied Physics A 123, 1-12, 2017 | 13 | 2017 |
| Modeling of double SAW resonator remote sensor M Binhack, S Klett, E Guliyev, W Buff, M Hamsch, R Hoffmann IEEE Symposium on Ultrasonics, 2003 2, 1416-1419, 2003 | 11 | 2003 |
| Self-actuated, self-sensing cantilever for fast CD measurement A Ahmad, T Ivanov, A Reum, E Guliyev, T Angelov, A Schuh, M Kaestner, ... Metrology, Inspection, and Process Control for Microlithography XXIX 9424 …, 2015 | 8 | 2015 |
Ivo Rangelow Prof. Dr.Technische Universität IlmenauVerified email at tu-ilmenau.de
